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Semiconductor Industry
Laser marking / Wafer Laser Trim 雷射晶圓修阻機
Product processing instruction
Other Product Description
Technical specification
Detailed related technical specifications.
項目 | 規格 | ||
---|---|---|---|
系統 | 內含:光源、載台控制系統、電腦等 | 外觀尺寸 | 1650mm(W)X1000mm(L)X1800mm(H)(不含三色警示燈) |
重量 | 1800kg | ||
台面 | XY行程 | Lens FOV | 17mmx17mm |
Spot Size | 6μm | ||
光源 | 雷射波長 | UV 355nm | |
功率 | 1W(0.2uJ~10uJ@50KHz) |